Abstract:

An alternative sensing circuit for a micro-electro-mechanical system (MEMS) microphone and a sensing method thereof are provided. The sensing circuit reads out output signals of an MEMS electret microphone or an MEMS condenser microphone. In considering different operating requirements of the different MEMS microphones, for example, low power consumption for the MEMS electret condenser microphone or high sensitivity for the MEMS condenser microphone, the manner of using two kinds of MEMS microphone sensing components in one circuit can significantly increase the flexibility of using the MEMS microphone and can be applied to the application or design of a condenser sensing component.

Description:

CROSS-REFERENCE TO RELATED APPLICATION

This application claims the priority benefit of Taiwan application serial no. 95149985, filed Dec. 29, 2006. All disclosure of the Taiwan application is incorporated herein by reference.

BACKGROUND OF THE INVENTION

1. Field of the Invention

The present invention relates to a sensing circuit for a micro-electro-mechanical system (MEMS) microphone. More particularly, the present invention relates to an integrated alternative sensing circuit for an MEMS microphone and a sensing method thereof.

2. Description of Related Art

Micro-Electro-Mechanical System (MEMS) technique is a design based on microminiaturized mechanical structures, which among others, is mainly used in three fields including micro sensor, micro actuator, and micro structure components. The micro sensor can employ relative semiconductor process techniques, and thus can be integrated with integrated circuits (ICs). Therefore, the competitiveness of this technique is improved, and this technique is also highly regarded. Micro sensor is a micro component having characteristics of a sensor, and can converts external physical or chemical status (e.g. light, heat, magnetism, sound, ...

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